Abstract
The characteristics of composite carbon films are experimentally studied. The films are synthesized under concurrent conditions of the magnetron and plasmatron sputtering of molybdenum disilicide and polyphenyl methylsiloxane (PPMS 2/5). Automodulation of the elemental and phase composition is found and studied in the direction of film deposition onto the substrate. The stability of the automodulation parameters to subsequent high-temperature annealing is examined.
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