Evolution of implicate order from amorphous to polycrystalline Sn-doped In2O3 films determined by in situ two-dimensional X-ray diffraction measurements

Abstract

We elucidated implicate ordering of amorphous Sn-doped In2O3 films grown on glass substrates during the phase transition to polycrystalline by postannealing from room temperature to 300 °C for 55 min. X-ray diffraction with two-dimensional detector revealed the following. First, fine grains are developed. Second, crystallites are grown with (222) preferential orientation associated with growing crystallites along (222) plane. Simultaneously, the alignment between grains is also promoted. Finally, while retaining the alignments among crystallites, long-range ordering was improved within the crystallites. Based on those findings, as a well-defined crystallization temperature, we propose a temperature at which the above-mentioned final stage starts.