Abstract

We report measurements of the surface peak intensity observed in high-energy He + ion scattering from Si(001)−2 × 1 surfaces as a function of projectile energy (0.1 to 2.0 MeV) and substrate temperature. Comparison of these results with measurements for the hydrogen adsorbed (1×1) surface and with calculation yield direct evidence of extensive sub-surface strain and give an indication of the magnitude of the atomic displacements.

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