Abstract

Low-energy (∼0.5 MeV)electrons arising from 60Co γ-irradiation were used to create phosphorus–vacancy (PV) pairs andoxygen–vacancy pairs in Czochralski-grown Si. Positron annihilation data showthat PV pairs anneal in two stages: the commonly observed stage around125 °C, where one third of the pairs disappear with an activation energy of0.8 ± 0.2 eV,and a new stage where none disappear, but form PV–oxygen complexes with an activation energy of2.0 ± 0.2 eV.

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