Abstract
The ZAF matrix correction procedure employed in the Desk Top Spectrum Analyzer program (DTSA) is considerably different from the FRAME matrix correction program from which it was derived. Enough differences exist that an evaluation of the results of quantitative analyses performed with the program needed to be done. The DTSA program is capable of providing all the peak intensities for each element analyzed; therefore, all of the peak fitting and background fitting functions were removed from the FRAME program. Also, since the database incorporated into DTSA contains all of the peak energies and the excitation energies (absorption edge energies) for all x-ray lines, the fitting procedures for computing these energies were removed from the FRAME program.An important change now in the the ZAF procedure is the computation of the atomic number correction. The absorption correction and the characteristic fluorescence correction are unchanged. A continuum fluorescence correction has not yet been included in the program.
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More From: Proceedings, annual meeting, Electron Microscopy Society of America
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