Experimental and theoretical X-Ray distribution function, δ(ρz), for microanalysis of thin

Abstract

Absorption and fluorescence corrections used in the quantitative microanalysis of thin specimens usually require prior knowledge of the variation of the generated x-ray intensity, ϕ(ρz), with mass depth, ρz. In the analysis of electron-transparent thin foils, ϕ(ρz) is generally assumed to be independent of mass thickness. This assumption may not apply when absorption and/or fluorescence corrections are necessary. As shown by Stenton et al, the x-ray distribution, ϕ(ρz) in thin foils can be determined experimentally by using the Tracer technique. ϕ(ρz)s for thin specimens have also been calculated theoretically by using the Monte Carlo technique.In our laboratory submicron spheres of pure or stoichiometric compound materials have been produced by a process called electrohydrodynamic (EHD) atomization for the purpose of determining the detector efficiency function of electron microscope x-ray detectors. Because the assumption of constant ϕ(ρz) may not apply for compounds that require absorption and/or fluorescence corrections, it was necessary to determine ϕ(ρz) for thin spheres.