Evaluation of the fluorinated antisticking layer by using photoemission and NEXAFS spectroscopies

Abstract

The electronic structures of four kinds of fluorinated self-assembled monolayers (F-SAMs) with different chain length, which were used for an antisticking layer, were investigated by the photoemission and the near-edge X-ray absorption fine structure (NEXAFS) spectroscopies. From the photoemission spectra in the wide and in the C 1s core-level regions, chemical compositions and components of the F-SAMs with different chain length were evaluated. By using the curve fitting analysis of the photoemission spectra in C 1s core-level region, it was found that the CF3 site is located at the top of the surface in the C sites of the F-SAM. From the C K-edge NEXAFS spectra of the F-SAMs as a function of the incidence angle of the excitation photon, it was shown that the σ*(C–F) and σ*(C–C) orbitals in the F-SAMs are parallel and perpendicular to the surface, respectively. This indicates that the C–C chain in (CF2) n part of the F-SAMs is perpendicular to the surface. Based on these results, the electronic structures of the F-SAMs are discussed.