Abstract
Surface texture data measured by optical type profilometer such as confocal microscope often contains outliers which may disturb the characterization of the surface texture. This paper evaluates an outlier specific correction procedure (OSCP) for areal surface texture data which can removes the outliers without affecting normal data points. The outliers are identified based on the median of its relative height to neighbouring data points within the detection window. The application of OSCP to areal topography data measured by confocal laser scanning microscope is compared to Gaussian filter and median filter. The result shows that, OSPC is better in outlier correction without affecting normal data points but there is a room of improvement.
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