Evaluation of newly developed X-ray diffractometer equipped with Johansson monochromator

Abstract

For the X-ray crystal truncation rod (CTR) scattering measurement using laboratory level X-ray source, a new X-ray diffractometer equipped with a Johansson monochromator was developed. The ability of the new diffractometer was evaluated by measuring and analyzing the X-ray CTR scattering spectra of an InP/GaInAs/InP structure sample. By comparing the results with that obtained by conventional angular scan method using synchrotron radiation (SR) as an X-ray source, it was shown that the quality of the spectra measured by using the new diffractometer was comparable to that measured by using SR when the measurement time was 30min. When the measurement time was as sort as a few minutes, the quality of the spectra was worse. However, even when the measurement time was a few minutes, the spectra were still useful to discuss the layer structures qualitatively. Therefore, the new diffractometer must be very useful for the quick and in-situ measurements.