Abstract
Abstract The design and realization of a Lamb wave oscillator sensor system are described. Both the oscillation frequency and the amplifier gain level are monitored, giving information about the Lamb wave velocity and amplitude, respectively. The system is fabricated in two separate silicon chips (hybrid set-up) or in one chip (monolithic set-up), and can be used for different sensor applications, in liquid or gas environment. We demonstrate the sensor for detection of the density and viscosity of a liquid, and for sensing of the adsorption of human serum albumin (HSA) at the sensor surface.
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