Abstract
The problem of depth profiling with PIXE is formulated as an explicit convolution integral, and the deconvolution algorithms previously used in the literature are reviewed. The best of them, up to now, which consists of an iterative procedure associated with data smoothing at each step of the iteration, is generalized and analyzed in detail. Starting from published cross sections for X-ray production, X-ray absorption coefficient and energy-range correspondence, it is shown that this procedure is able to reproduce nicely the flat profile of a homogeneous Ag-3 at.% Zn alloy as well as the erf-like profile of Zn depletion in the same alloy after an annealing treatment under vacuum. The emphasis is put on the sensitivity of the method and on how straining conditions can improve it.
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