Abstract
In the present research, to investigate the crack initiation criterion at the interfacial edge with a nanoscale singular stress field, we conduct mechanical experiments using four kinds of nano-cantilever-shaped specimens where a crack is initiated at the copper/silicon nitride interface. The results reveal that regardless of the specimen dimensions, Kdissimilarinterfaceedge(C) is constant (112 MPa•m0.179) within the nanoscale singular stress field. The interface crack initiation is dominated by the nanoscale singular stress field near the interface edge in the nano-sized multilayered component.
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