Abstract
Epitaxial Ba x Sr 1 m x TiO 3 (BST) films grown on LaAlO 3 by several deposition methods have been tested in coupled microstrip phase shifters (CMPS) at frequencies from 10 to 24 GHz. To date the best performance for the devices has been achieved using Pulsed Laser Deposition (PLD). However, recently chemical solution deposition (CSD) methods such as sol-gel and Metal-Organic Chemical Liquid Deposition (MOCLD) have shown advances in fabricating BST films for tunable microwave applications. CSD processes promise improvements in cost, speed and area covered during BST film deposition. This paper compares over 35 BST films used in identical CMPS circuits. In this study, the highest measured figures of merit of phase shift per dB of loss for PLD, MOCLD and sol-gel CMPS are 49, 47 and 41°/dB respectively. While other phase shifter designs using BST films have surpassed these values, these data base of identical circuits allows us to compare the BST films. X-ray diffraction characterization for many of the BST films is also given.
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