Evaluation of a vertical piezoelectric transducer stage using a large range metrological atomic force microscope

Abstract

A method is described for the calibration of vertical piezoelectric transducer (PZT) stages using a large range metrological atomic force microscope (LRM-AFM). A vertical PZT stage is mounted onto the system andanoptical-flat sampleisattachedonthetopofthePZTstage.TheAFM probe is operated in contact mode and used as a null indicator to measure the movement of the optical-flat as it is driven by the PZT stage. As the PZT stageisscannedvertically,theAFMprobeisincontactwiththetestsurface without lateral scanning. The displacement of the vertical stage of the LRM-AFM is measured by the integrated laser interferometer, and the corresponding laser interferometer readings and the nominal position of the PZT stage are recorded. This body of data is then used to establish the relationship between the laser interferometer reading and the nominal displacement of the PZT stage. Our results show that this method can be used to calibrate PZT stages up to a range of 250 μm with an expanded uncertainty of less than 5 nm. © 2012 Society of Photo-Optical Instrumentation Engi-