Abstract
Contamination and oxidation of thin films are a challenge to surface analysis. They may influence the surface chemistry and thus making profound thin film and surface analysis difficult. Therefore, we evaluate a method how a commercial mobile vacuum transfer vessel commonly used for glove box preparation and transport, can be operated for a timesaving, in vacuo, bidirectional high-vacuum transport and analysis. The evaluation of this system is done using as-deposited, highly reactive Ti thin-films which were transferred to and analyzed in a XPS system. We report a reduction of surface oxidation and contamination for several transfer modes, limited by the transfer time and procedure.
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