Evaluation and metrological performance of a novel ionisation vacuum gauge suitable as reference standard

Abstract

Recently, a new type of ionization vacuum gauge was introduced, which was proposed as a reference and transfer standard in the range of 10-6 Pa to 10-2 Pa because of its excellent stability and linearity. In contrast to present models of ionisation vacuum gauges, all electrons have a well-defined path length through the ionisation space. This even allows one to predict the sensitivity for a gas species provided that the ionisation cross section of the gas molecules for electrons between 50 eV and 200 eV is known. Following the development of this gauge we investigated its metrological performance in terms of linearity, resolution, repeatability, reproducibility, transport and long-term stability, disturbances by magnetic fields, influence of the surrounding earth potential and so on. The gauge demonstrated excellent metrological properties and is indeed suitable as an accurate reference and transfer standard, but can also provide important economic benefits to manufacturers and users.