Abstract
Kr and Xe plasmas are very intensive emitters in thespectral range of 100-150 Å, which is relevant for a numberof applications (for example microlithography). We presentinvestigations of the extreme utraviolet (EUV) emission from a slow capillary dischargewith Kr and Xe fillings. The emission of Kr ions (Kr VIII to Kr XI)within the range of 70-150 Å consists of three bands oflines of about 10 Å width with maxima at 116, 103and 86 Å. Xe emission bands of about 15 Å width havetheir maxima at 136 and 115 Å (Xe IX to Xe XII). Theradiation duration in this spectral range is ~150 ns forboth elements. At the optimum conditions, the Kr emission at103 Å is 2-3 times more intense than the Xe emission at136 Å. The measured spectral energy of Kr radiation is about0.1 J sr-1 Å-1. Experimental results arecompared with numerical modellings of the dynamics and emission ofthe capillary discharge plasma, which enables the determination ofplasma parameters and the future use of the codes as additionalinstruments for plasma diagnostics.
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