Abstract
Eu-doped lead zirconate titanate(Pb<TEX>$\sub$</TEX>1.1/(Zr<TEX>$\sub$</TEX>0.6/Ti<TEX>$\sub$</TEX>0.4/)O<TEX>$_3$</TEX>; PZT) thin films on the Pt/Ti/SiO<TEX>$_2$</TEX>/Si substrates prepared by a sol-gel method. The effect on structural and electrical properties of PZT thin films measured according to the Eu content. Eu-doping altered significantly dielectric and ferroelectric properties. The remanent polarization and the coercive field decreased with the increasing Eu content. The dielectric constant and the dielectric loss of PZT thin films decreased with the increasing Eu content. The 0.5 mol% of Eu-doped PZT thin film showed improved fatigue characteristic comparing to the undoped PZT thin film.
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