Abstract
The paper describes the investigations the temperature and concentration influence on etching of nanoporous alumina in technology of production of self-organized aluminum mesh for sensor and display applications. The pyramidal aluminum meshes was obtained by anodizing of thin film sputtered on sodium glass in oxalic acid solution at voltage of 50 V and then chemical etching of porous alumina in the mixture of phosphoric and chromic acid. It has been shown that the pyramidal morphology of Al meshes can be prepared by chemical etching at temperature of 60°C. This pyramidal morphology of Al mesh can provide good alignment properties and can be one of the promising solutions for production of sensory microsystems and displays without indium-tin oxide films.
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