Abstract
Extreme ultraviolet (EUV) discharge-based lamps for EUV lithography need to generate extremely high power in the narrow spectrum band of 13.5±0.135 nm. A simplified time-dependent collisional-radiative model and radiative transfer solution were utilized to investigate the wavelength-integrated Lyman-α line light outputs in a hydrogen-like lithium ion. The study reveals in particular that a steady-state or magnetically confined lithium plasma radiates in the desired spectrum band not less than 1 kW in 2π sr even at an ion density region as low as 1017 cm−3.
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