Estimation of needle height using relative parallax between two SIM images in single-column focused ion beam instrument

Abstract

Gallium liquid metal ion source focused ion beam (FIB) instruments are widely used for cross-sectional sample preparation of specific areas of interest for scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Most FIB instruments are equipped with a metal needle for manipulation of the sample in the sample chamber most commonly as a micro-sampling probe for preparing TEM samples. Automatic needle manipulation has not yet been achieved for a conventional single-column FIB instrument without an SEM column because a reliable method for measuring needle height has not been established yet. This study investigated the use of scanning ion microscope (SIM) image processing to measure needle height from the sample surface in a conventional single-column FIB instrument without an SEM column. The needle height is measured using the relative parallax between two SIM images in which the needle is observed from two directions using a conventional aligner without the use of any special devices. It was demonstrated that the relative parallax was proportional to the needle height. The estimation precision was about several 10 μm, which is sufficient for automatic manipulation and safe touchdown of a needle in practical micro-sampling.