Abstract
The measurement of surface acoustic wave (SAW) velocity is used to estimate the surface properties because the velocity depends on the elastic properties near the surface. To estimate the elastic constants, we developed a new inverse method combining the Monte Carlo method and the downhill simplex method. The initial values are determined using many random numbers, instead of an arbitrarily chosen several sets of values, in order to reduce the risk of trapping by the local pseudo minima. We confirm that the estimated elastic constants agree well with the reported elastic constants of Si and the experimental SAW velocity is quite well reproduced. We estimate the elastic constants of quartz for application purposes.
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