Abstract
This work demonstrates the feasibility of a novel yet simple method of obtaining XPS images using a conventional X-ray photoelectron spectrometer with a minimum of modification. A spherical sector electron energy analyser is operated in the selected area mode (small input aperture, moderate lens magnification) and deflection plates are introduced between the input lens and the sample, allowing the virtual image of the input aperture to be raster-scanned across the sample surface. The image is then formed by using the customary spectrometer output to z-modulate a synchronously raster-scanned video monitor. At present, the resolution is 150 μ but improvements to 10 μ should eventually be possible. Examples are given of studies on electronic components with insulating and conducting areas.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Electron Spectroscopy and Related Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
