Abstract
A calibration system was designed to evaluate the accuracy of linear optical encoders at the micron level in a fast and economical manner. The system uses a commercial interferometer and motor stage as the calibrator and moving platform. Error analysis is necessary to prove the effectiveness and identify areas for optimization. A fixture was designed for the scale and interferometer target to meet the Abbe principle. A five-degree-of-freedom manual stage was utilized to adjust the reading head in optimal or suboptimal working conditions, such as working distance, offset, and angular misalignment. The results indicate that the calibration system has an accuracy of ±2.2 μm. The geometric errors of the calibration system, including mounting errors and non-ideal motions, are analyzed in detail. The system could be an inexpensive solution for encoder manufacturers and customers to calibrate a linear optical encoder or test its performance.
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