Abstract
In the online published article, it was neglected to note that the flow rates listed in the Table 1 for the DMSe flow were based on a nitrogen flow controller. The nitrogen to DMSe flow rate conversion factor was not available for the MKS flow controller that was used. A conversion factor of 0.34 from a different flow controller manufacturer was recently found. The actual DMSe flow rate may be approximated by multiplying the table entry by 0.34. Thus for a flow rate of 5 sccm listed in the table for DMSe, the true flow rate is likely close to (0.34) 9 5 sccm = 1.7 sccm.
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