Abstract
Micro-abrasive blasting is becoming an important technique to produce optical, electronic and precision mechanical equipment. The process is based on the erosion of a mask-protected brittle substrate by a high-velocity particle beam. This paper presents the results of erosion tests using three groups of mask materials: metals, elastomers and photo-resist. The results are compared in terms of erosion resistance and transfer accuracy of the pattern. It was found that each type of mask material has its own economical and technological relevance.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
