Abstract
Micro abrasive blasting (MAB) is becoming an important machining technique for the fabrication of Micro Electro Mechanical systems. The process is based on the erosion of a mask-protected brittle substrate by an abrasive-laden air jet. Currently available blasting machines are relatively simple. However, to exploit this technique for applications of industrial interest a more efficient and controllable process is required. In this paper abrasive blasting is analysed by means of a set of models containing different sub-models for the particle beam, the material removal mechanism and the resulting blasting profile. A new line-shaped Laval nozzle has been developed, which is able to increase the particle velocity by 40% compared to a conventional round nozzle. The blasting-profile of this line-shaped nozzle is more uniform and the material removal rate is significantly higher compared to conventional nozzles, which in turn leads to higher achievable aspect ratios of the three-dimensional microstructures.
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