Abstract
In semiconductor wafer manufacturing, there are only a few processes but many steps. Each wafer must go through the processes multiple times (steps) and sometimes not in the same sequence. All the wafers in lot size of 25 pieces are transferred between the processes using an Automated Guided Vehicle from stocker to stocker. Then, the wafers are manually transferred to the processing tool. Although the tools are designed per SEMI S2/S8 standards [1,, the equipment technician can get into awkward postures when performing the preventive maintenance. Both the manual material handling between the tools and awkward postures during preventive maintenance can pose an ergonomic challenge. However, some techniques can be used to minimize the impact. This paper shares the techniques which can ease ergonomic problems in semiconductor wafer manufacturing
Highlights
In semiconductor wafer manufacturing, there are 6 main processes, namely, Chemical-mechanical Planarization, Diffusion, Etch, Implant, Thin Film and Photolithography
The tools need to be maintained regularly. They are designed per SEMI S2/S8 standards, the equipment technician can get into awkward posture when performing the preventive maintenance
Sometimes the technician is required to lift parts that are heavier than 20 kg. These activities are usually considered medium to low risk items, using SEMI S10 standards [3], due to the low frequency of occurrence and short duration of exposure
Summary
There are 6 main processes, namely, Chemical-mechanical Planarization, Diffusion, Etch, Implant, Thin Film and Photolithography. The tools need to be maintained regularly They are designed per SEMI S2/S8 standards, the equipment technician can get into awkward posture when performing the preventive maintenance. Sometimes the technician is required to lift parts that are heavier than 20 kg These activities are usually considered medium to low risk items, using SEMI S10 standards [3], due to the low frequency of occurrence and short duration of exposure. The manufacturing technician performs up to 60 lifts per hour transferring the wafer pod from the stocker to the tool. They are trained in the proper lifting technique to avoid ergonomic problems.
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