Abstract
Microfocussed ion guns. A range of Microfocussed ion guns is available from VG Ionex which addresses a growing interest in many exciting new fields such as high resolution SIMS analysis, micro‐machining, ion beam lithography and sub‐micron surface engineering. The guns produce intense and highly stable beams with spot sizes down to less than 500 Angstroms. The current densities produced are in the range 1 Amp.cm−2. Gallium is the most popular source material but alternative metals and alloys are available for special applications. The guns are available as separate items or as part of complete systems.
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