Abstract
This paper presents an experimental method for obtaining a single system thin films allotropes (graphite, carbyne, diamond) forms of carbon. The basic idea of the method consists in photoactivation of adatoms carbon on the surface of the substrate by the radiation source in the range from near IR to near UV. The receipt of the particular allotropic phase of carbon, namely diamond-like or carbyne structure is the result of selection of the deposition parameters: power density and spectral composition of the radiation, substrate temperature, mode of operation of the magnetron. The conducted researches allowed to receive DLC films with the density of the radiation flux on the sample is not less than 1.5·10−4 W/m2 in the wavelength range of 170-255 nm. In the received film carbon content of sp3-hybridized condition was ∼30%. The study of the elemental composition of the obtained films was carried out using x-ray photoelectron spectroscopy (XPS). Diagnostics of the structure was performed by electron energy loss spectroscopy (EELS).
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call