EPMA analysis of insulating materials: Monte Carlo simulations and experiments

Abstract

Using a realistic model for the electric field build-up that takes into account detrapping processes in insulating materials irradiated by electrons, a Monte Carlo approach has been applied to ground-coated binary oxides such as Al2O3 and Nb2O5. Changes entailed by the internal electric field build-up on the generation of the characteristic x-ray quanta and also on backscattered electron emission are investigated. The results clearly show that the depth distribution of characteristic x-ray production is modified and the Φ(ρz) function for both metal and oxygen Kα lines is compressed towards the surface while the backscattering electron emission is roughly unchanged. The change of the x-ray intensities as a function of the electric field is clearly established. The outcome is checked experimentally by measuring simultaneously the trapped charge and the emitted x-ray spectra during electron irradiation.