Abstract
Epitaxial YSi2−x films have been fabricated. The smooth 430-Å-thick silicide films on Si (111) substrates were characterized by a Rutherford backscattering minimum channeling yield χmin =8%, establishing YSi2−x as one of the best known epitaxial silicides. Results of electrical measurements are also presented.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
