Abstract

Abstract The atomistic model of the liquid phase epitaxial regrowth has been suggested. The model suggestes that the multiatomic (n > 3) nuclei are formed near the regrowth front and they as a whole are attached to the growing crystal. The present model is able to account for the orientation dependency of the crystal growth and to explain the pecularities of the defect formation during the pulsed nanosecond annealing.

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