Epitaxial lift-off of thin InAs layers

Abstract

We describe the use of the epitaxial lift-off technique to remove thin layers of InAs from the GaAs substrates on which they were grown and subsequently bonded to glass and silicon substrates. Lift-off was accomplished by taking advantage of the high etching selectivity between AlSb and InAs in an aqueous hydrofluoric acid etching solution, allowing a thin layer of AlSb to serve a sacrificial layer to facilitate the lift-off of the InAs. The InAs layers were transferred with little measurable effect on the electrical and structural properties of the films, as evidenced by Hall effect and x-ray measurements. The technique can easily be extended to transfer more-complex GaSb/AlSb/InAs structures.