Abstract
Rutile-phase TiO2 thin films have been epitaxially grown on GaAs(100) substrates at 700 °C under 5 Pa oxygen ambient pressure, and at room temperature (30 °C) and 5×10−4 Pa base vacuum by KrF pulsed excimer laser deposition. The [110]-oriented TiO2 films were composed of two types of domains perpendicular to each other in the plane. From atomic force microscopy analysis, the epitaxial films had a surface with roughness less than 7 nm in root-mean-square.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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