Abstract
La–Ca–Mn–O (LCMO) thin film with 145 nm thickness was epitaxially grown on a LaAlO3(100) substrate using radio frequency (rf) magnetron sputtering. The crystalline structure of the LCMO thin film on LaAlO3(LAO) was characterized using backscattering (BS)/channeling and four-circle x-ray diffractometer. LCMO thin film grown at 600 °C and rf power level of 100 W shows the full width at half maximum of 0.311° in the x-ray diffraction (XRD) θ-rocking curve for the LCMO (200) peak. Such a large value, however, is inconsistent with the very small BS/channeling minimum channeling yield (χmin) 4.98%. Thus, the origin of this discrepancy between the results is examined. In channeling angular scans of 〈001〉 and 〈011〉 axial direction in the (100) plane for the LCMO film on the LAO substrate, only the 〈011〉 direction showed an angular scan difference by 1.12°. In addition, it can be observed that the substrate intrinsically has the out-of-plane twin structure from the high-resolution XRD θ rocking on the LaAlO3(200) peak. From earlier results, it can be concluded the film with only the strained layer was epitaxially grown on the out-of-plane twinned substrate.
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