Epitaxial Growth of 4H-SiC with High Growth Rate Using CH<sub>3</sub>Cl and SiCl<sub>4</sub> Chlorinated Growth Precursors

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Thick 4H-SiC epitaxial layers have been grown using a combination of two chlorinated precursors silicon tetrachloride (SiCl4) and chloromethane (CH3Cl) at 16000C. Growth rates up to 100 m/hr have been demonstrated. The use of chloro-silane precursor eliminated the problem of homogenous nucleation of Si in the gas phase, which was significant in CH3Cl/SiH4 growth. Much higher values of Si/H2 and C/H2 ratios without morphology degradation were made possible by increasing the growth temperature from 1300 to 1600°C. Results of photoluminescence and high-resolution X-ray diffraction and time-resolved PL were used to evaluate the quality of the epitaxial layers. The crystalline quality and the growth rate achieved so far offer a promise of exceeding the state of the arts results achieved with more traditional hydro-carbon precursors.