Environmental Risk Evaluation on Integrated Circuit Industry

Abstract

In order to evaluate the environmental risk of integrated circuit industry, a new integrated circuit chip project was taken as an example to be investigated and analyzed. Its engineering features, process flow, risk identification, risk source intensity and measures to prevent risks were proposed. Risk identification shows that main poisonous and harmful chemicals(PHC) are corrosives and antioxidants, flammable gases and liquids and poisonous gases. Transportation, production and storage risk of PHC and potential accidental risk caused by external factors were proposed. Risk source analysis indicates that the probability of damaging and leaking accidents on facilities is 10-1 times/year. In the case of cylinders leakage, leakage rates of SiF4, Cl2 and ClF3 will be 17 g/s, 8 g/s and 8 g/s respectively. Evaporation rates of isopropyl alcohol, HF and HCl acids are 0.09 g/s. 0.38 g/s and 55 g/s respectively. Finally, Overall layout and construction safety measures, safety precautions on dangerous chemical storage and transportation, technology design and automatic control design, and emergency plan to prevent risk accident were also proponed. This work will be helpful for environmental impact assessment on similar industries.