Abstract
This work presents closed form solutions for fully developed temperature distribution and entropy generation due to forced convection in microelectromechanical systems (MEMS) in the Slip-flow regime, for which the Knudsen number lies within the range 0.001<Kn<0.1. Two different cross-sections are analyzed, being microducts (composed of two parallel plates) and micropipes, with the effects of viscous dissipation being included. Invoking the temperature jump equation, two different thermal boundary conditions are investigated, being isothermal and isoflux walls. Expressions are presented for the local and bulk temperature profiles, the Nusselt number, the Bejan number, and the entropy generation rate in terms of the key parameters. Though the results are obtained for the microscale problems, they can be generalized to the macroscale counterparts by letting Kn=0.
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