Enhancing transparent thermoelectric properties of Sb-doped ZnO thin films via controlled deposition temperature

Abstract

ZnO is known as a wide-bandgap transparent thermoelectric material. Herein, the electronic transport and temperature-dependent thermoelectric properties of transparent Sb-doped ZnO (SZO) films are reported. The sputtered SZO films prepared at the optimum deposition temperature of 673 K show an n-type semiconducting behavior with the highest thermoelectric power factor of 406 μW/mK2 at 773 K, and a good transmittance ∼82% in the wavelength region of 400–1100 nm. It can well meet the requirements for transparent thermoelectric thin films. Through X-ray diffraction, UV–Vis, and photoluminescence analyses, the Zn2+ substitution by Sb5+ can be elucidated for significantly enhancing the Seebeck coefficient and thermoelectric power factor due to the increase of density-of-state effective mass.