Abstract

The effects of moderate annealing temperature (600–800 °C) on the microstructure, fatigue endurance, retention characteristic, and remnant polarization (2 P r) of Bi 3.25Eu 0.75Ti 3O 12 (BET) thin films prepared by metal-organic decomposition (MOD) were studied in detail. 2 P r (66 µC/cm 2 under 300 kV/cm), fatigue endurance (3% loss of 2 P r after 1.2 × 10 10 switching cycles), and retention characteristic (no significant polarization loss after 1.8 × 10 5s) for BET thin film annealed at 700 °C are better than those for thin films annealed at other temperature. The mechanisms concerning the dependence of microstructure and ferroelectric properties on the annealing temperature were discussed.

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