Abstract
We demonstrated enhancement of in-band conversion efficiency (CE) at 13.5nm of the extreme ultraviolet (EUV) emission from a tin (Sn) cavity target irradiated by a CO2 laser pulse. Whereas a planar Sn target produced an in-band CE of around 2%, the use of cavity targets significantly enhanced the EUV emission energy and the EUV CE. An EUV CE of 4% was observed for a Sn cavity target with a depth of 200μm which is one of the highest values ever reported.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
