Abstract
Soft breakdown properties affected by photon energy during rapid thermal post-oxidation annealing (POA) of ultra-thin gate oxide are investigated. Generally, breakdown can be classified into normal hard breakdown (HBD) and soft breakdown (SBD). It was found that the occurrence of HBD and SBD depends on the process and stress field. Samples with front and back sides illuminated by a tungsten–halogen lamp during rapid thermal POA were examined. We find that front side illuminated oxides show easier SBD than back side ones. These results indicate that the photon energy may not only enhance the strength of Si–O bonds to suppress the lateral propagation of breakdown spots, but also to localize defects to form a conductive path of the leakage current. The understanding of the photon effect in rapid thermal POA is useful for controlling the electrical properties of ultra-thin gate oxides.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
