Enhancement in optical characteristics of c-axis-oriented radio frequency–sputtered ZnO thin films through growth ambient and annealing temperature optimization

Abstract

High-quality radio frequency–sputtered ZnO were grown on Si substrates at 400°C at various partial gas pressures (Ar/Ar+O2). Subsequently, to remove as-grown defects, high temperature annealing from 700 to 900°C on as-grown samples in constant oxygen flow for 10s was performed. X-ray diffraction study confirmed the formation of highly crystalline films with a dominant peak at (002). The sample grown in 50% Ar and 50% O2 ambient exhibited the lowest linewidth (2θ=~0.2728°) and highest stoichiometry. Grain size of the as grown samples decreased with increase in the partial pressure of oxygen till a certain ratio (1:1), and photoluminescence (PL) improved with increase in annealing temperature. Low-temperature (18K) PL measurements showed a near-band-edge emission peak at 3.37eV, and the highest peak intensity (more than six orders compared to others with narrow linewidth of ~0.01272eV) was exhibited by the sample annealed at 900°C and was six orders higher than that of the as-grown sample. All as-grown samples exhibited dominant visible-range peaks due to emission from defect states.