Abstract

A high-speed Pulsed Laser Deposition method with the deposition rate of several ten microns per hour followed by a post-annealing process enabled us to obtain isotropic Fe-Pt thick film magnets with the L10 order phase. In the study, we investigated the relationship between droplets and coercivity of the post-annealing films. It was found that the reduction in the numbers of droplets enabled us to increase the coercivity although the average deposition rate decreased from 40 to 15 μm per hour. In the samples with Ra less than 0.5 μm, the coercivity exceeded 450 kA/m at the annealing temperature of 673 K. A SEM-EDX analysis of droplets revealed that they tended to have iron-rich or platinum-rich compositions compared with the average one of Fe50Pt50.

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