Abstract

Coupled resonant sensors have been used in a large number of sensing systems with microelectromechanical systems, enabling multi-sensing using single input-output connections as one can record the collective behaviour of an array of coupled resonant sensors using the response of only one of their elements. The forward problem with these systems is to identify the change in eigenvalues recorded when some sensing operation takes place, which often reflects as a eigenvalue perturbation problem. The reverse problem of identifying the sensing element and the sensing amount is challenging, when recording only one readout in such systems. This paper provides a robust new technique to do so with enhanced accuracy and noise tolerance. This is achieved by using properties of eigenpairs and an inverse analysis. The method has been verified using experimental data from an array of coupled microelectromechanical resonators. The technique has also been analysed for potential experimental errors including quantisation and random noises.

Full Text
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