Enhanced sensitivity of MEMS bolometers by introducing two-dimensional phononic crystal structures

Abstract

Microelectromechanical system (MEMS)-based resonators are very attractive for sensing applications owing to their high sensitivities. Recently, we proposed an uncooled, all electrical driving and detecting, sensitive bolometer by using a doubly clamped MEMS beam resonator, which is very promising for realizing high sensitivity and fast terahertz (THz) detection at room temperature1. The sensitivity of the MEMS bolometer is inversely proportional to the thermal conductivity of the beam and it has been considered that its value is specific to the material and cannot be changed.