Abstract
Near-ultraviolet (UV) InGaN/AlGaN multiple quantum well (MQW) LEDs with 30 pairs AlGaN/GaN distributed Bragg reflectors (DBRs) were grown on 6H–SiC substrate by metal-organic chemical vapor deposition. A thin SiNx interlayer was introduced between the DBRs and n-GaN layer of the LED to reduce the threading dislocation density and result in enhancement the internal quantum efficiency (ηint) of the InGaN/AlGaN LED. The result indicates that the light output power for the LED with DBRs and SiNx interlayer was approximately 56% higher (at 350mA) than the LED without DBRs and SiNx interlayer on 6H–SiC substrate, and this significant improvement in performance is attributed not only to the light extraction enhancement via the DBRs but also due to improve epilayer crystalline quality.
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