Abstract

We demonstrate the performance improvement of GaN-based light-emitting diodes (LEDs) using zinc oxide (ZnO) nanoparticles inserted between the p-GaN and the indium tin oxide (ITO) layers. Upon deposition of an ITO film over the dispersed ZnO nanoparticles, the ITO surface tends to attain a nano-rough morphology due to the presence of ZnO nanoparticles. The light output power of the fabricated LEDs with ZnO nanoparticles is 39% higher than that of conventional LEDs at an injection current of 20 mA. This is attributed to the improved light extraction favored by the light scattering tendency of ZnO nanoparticles and the nano-roughened ITO film. In addition, the intermediate refractive index (n ∼2) of ZnO materials between those of the p-GaN (n ∼2.5) and the ITO (n ∼1.9) results in a broader critical angle and a reduction of total internal reflection.

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