Abstract
Lead Hafnate-Titanate, Pb(Hf0.3Ti0.7)O3 (PHT), films were fabricated by PLD on Al2O3 (0001) substrates with Pt or SrRuO3 (SRO) bottom electrodes, respectively. There is a certain amount of pyrochlore phase in PHT films on Pt/Al2O3. In contrast, the PHT films on SRO/Al2O3 show pure pervoskite phase. Furthermore, the PHT thin films on SRO/Al2O3, show uniform gain size and significantly enhanced ferroelectric properties with larger remnant polarization (2 Pr = 59.1μC/cm2), better fatigue endurance and lower leakage current density (8.5 × 10−8A/cm2 at 150 kV/cm). With the enhanced properties, PHT ferroelectric film on SRO electrode could be a promising structure which can be applied in FeRAM.
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